Title:	Ultrashort Laser-Induced Periodic Surface Structures on Crystalline Silicon
Authors:	Anoop, K K Verma, Nancy Joy, Nithin Philip, Reji
Issue Date:	Jun-2020
Publisher:	AIP Publishing
Citation:	AIP Conference Proceedings, 2020, Vol.2244, p070019, Proceedings of the International Conference on Physics of Materials and Nanotechnology ICPN 2019
Abstract:	Laser-induced periodic surface structures (LIPSS) on metals and semiconductors have emerged as a powerful technique for material processing in the micro-nanoscale. We have fabricated small and large scale LIPSS on a crystalline silicon (100) target using femtosecond Ti: Sapphire laser pulses (100 fs, 10 Hz). The periodic structures or ripples obtained with the fundamental beam (800 nm) and second harmonic beam (400 nm) confirm the surface scattered wave model of LIPSS given by Sipe et al. [1]. Figure 1 shows the fabricated LIPSS on the silicon surface, with the ripple period of the order of excitation wavelength. Our experiments confirm that laser pulse energy, wavelength, number of shots, and state of polarization play a crucial role in the fabrication of laser-induced periodic surface structures in the micro-nanoscale. The large area periodic surface structures show a substantial reduction in reflection or enhanced absorption (in the visible range) with respect to the unprocessed silicon wafer. The increase in surface area and enhanced absorption rate of processed silicon targets can be utilized in photovoltaic and other material science applications [2].
Description:	Restricted Access.
URI:	http://hdl.handle.net/2289/7543
ISSN:	9780735420038
Alternative Location:	https://ui.adsabs.harvard.edu/abs/2020AIPC.2244g0019A/abstract https://doi.org/10.1063/5.0009022
Copyright:	2020 American Institute of Physics
Appears in Collections:	Research Papers (LAMP)

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