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Applicability of the van der Pauw–Hall measurement technique to implanted samples

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1984 J of Appl Phys V55 p4450.pdf (99.22 KB)

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1984-06-15

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The American Institute of Physics

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Abstract

The application of the van der Pauw–Hall measurement technique to implanted samples in which the mobility varies with depth has still not been fully justified. A proof that the technique is in fact applicable in this situation is given.

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Journal of Applied Physics, 1984, Vol.55, p4450-4451

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http://hdl.handle.net/2289/1263

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(1984) American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics.